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Depth-of-Focus Determination for Talbot Lithography of Large-Scale Free-Standing Periodic Features

Author(s): Zhou, SL (Zhou, Shaolin); Liu, JB (Liu, Junbo); Deng, Q (Deng, Qian); Xie, CQ (Xie, Changqing); Chan, MS (Chan, Mansun)
Source: IEEE PHOTONICS TECHNOLOGY LETTERS  Volume: 28  Issue: 22  Pages: 2491-2494  DOI: 10.1109/LPT.2016.2601639  Published: NOV 15 2016 
Abstract: The depth-of-focus (DOF) is an important factor to influence the pattern quality but seldom treated in conventional contact or proximity lithography. One explicit formula for DOF prediction is analytically derived in the context of photolithography of periodic features (i.e., the Talbot lithography), in which wavefront aberrations contributed by all diffraction orders are considered. Besides the numerical elucidations, a direct photolithographic process is also customized for experimental demonstration. With strict DOF estimation based on the governing equation for thickness control of the resist coating, large-scale freestanding features of micromeshes with well-controlled perforation and steepness are fabricated.
IDS Number: EC4MY
ISSN: 1041-1135
eISSN: 1941-0174

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