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Ultra-precision Figuring Using Submerged Jet Polishing

Author(s): Shi, CY (Shi, Chunyan); Yuan, JH (Yuan, Jiahu); Wu, F (Wu, Fan); Wan, YJ (Wan, Yongjian)
Source: CHINESE OPTICS LETTERS  Volume: 9  Issue: 9  Article Number: 092201  DOI: 10.3788/COL201109.092201  Published: SEP 10 2011 
Abstract: A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 lambda to 0.024 lambda (lambda = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 lambda to 0.00395 lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
Addresses: [Shi, CY; Yuan, JH; Wu, F; Wan, YJ] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Reprint Address: Shi, CY (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
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